ELS-BODEN 新型電子束光刻系統(tǒng)

NEW ELS-BODEN Electron Beam Lithography System

新型ELS-BODEN 電子束光刻系統(tǒng)

ELS Series

ELS-BODEN Ó
Fastest in the industry!

業(yè)內(nèi)!
High speed scanning at 400MHz clock frequency for production

高速掃描400MHz頻率生產(chǎn)

Key Product Features

關(guān)鍵產(chǎn)品特性Fastest in the industry!

• The industry's fastest 400 MHz high speed scanning

業(yè)界的400mhz高速掃描
High speed beam scanning, 4 times faster than our previous products.

高速光束掃描，比我們以前的產(chǎn)品快4倍。
High current and narrow beam pitch, which was not possible until now.

大電流和窄波束間距，這是不可能的，直到現(xiàn)在。
The new system achieves faster and higher quality writing. It is ideal for the MPWS (field-polymerized writing).
新系統(tǒng)實(shí)現(xiàn)更快和更高質(zhì)量的刻寫。它是MPWS(現(xiàn)場(chǎng)聚合刻寫)的理想選擇。
• Faster stage speed

階段的速度更快
Redesigned the stage to meet the demands of production applications and achieved higher speeds.

重新設(shè)計(jì)了工作臺(tái)，以滿足生產(chǎn)應(yīng)用的要求，并實(shí)現(xiàn)了更高的速度。

• Inherits traditional Elionix technology

繼承了傳統(tǒng)的Elionix技術(shù)
150kV/125kV if the ultra-fine patterns are most important.

150kV/125kV如果超細(xì)圖案是最重要的。
100 kV for common system and wide variety of applications

100kv用于普通系統(tǒng)和廣泛的應(yīng)用
50 kV for high speed writing for the production.

50kv用于高速寫作，用于生產(chǎn)。
It can meet user's several requirements.

能滿足用戶多方面的要求。

Specification 規(guī)格參數(shù)：